• DocumentCode
    3497097
  • Title

    Micro actuator array on a flexible sheet — Smart MEMS sheet

  • Author

    Ataka, M. ; Fujita, Hideaki

  • Author_Institution
    Center for Int. Res. on MicroNano Mechatron., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    536
  • Lastpage
    539
  • Abstract
    This paper reports fabrication results of a microactuator array on a flexible sheet. The design was based on the concept of “smart MEMS sheet”, a flexible version of autonomous decentralized MEMS. The fabricated actuator array consists of thermally driven cantilever actuators (ciliary actuators) and the flexible sheet is Kapton® sheet. Both are made of Polyimide, a flexible material. We succeeded to fabricate 768 actuators on the sheet of 18mm × 24mm and tried to operate it as a 2D manipulator on a curved surface.
  • Keywords
    cantilevers; flexible manipulators; microactuators; microfabrication; micromanipulators; polymer films; 2D manipulator; Kapton sheet; autonomous decentralized MEMS; ciliary actuators; curved surface; flexible material; flexible sheet; microactuator array fabrication; polyimide; smart MEMS sheet; thermally-driven cantilever actuators; Actuators; Arrays; Fabrication; Manipulators; Micromechanical devices; Polyimides; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474297
  • Filename
    6474297
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3497097