Title :
Design, fabrication and characterization of a suspended plate mechano-optical modulator
Author :
Nawazuddin, M.B.S. ; de Boer, Maaike ; Berenschot, J.W. ; Ma, K.C. ; Elwenspoek, Miko ; Wiegerink, R.J.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect [1]. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.
Keywords :
electrostatic actuators; nanoelectromechanical devices; optical waveguides; silicon compounds; IONM effect; SiN; bi-directional electrostatic actuation; hybrid integration; integrated optical nanomechanical effect; light-weight suspended plate structure; mechanical structure; mechano-optical modulator; optical waveguide; rigid silicon-nitride suspended plate structure; separate chips; strengthening ridges; switching speed; Optical device fabrication; Optical filters; Optical modulation; Optical sensors; Optical surface waves; Optical waveguides;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474303
