• DocumentCode
    3497282
  • Title

    Conducting Sb-doped SnO2 as gas sensor

  • Author

    Marlianto, Eddy ; Yahaya, Muhammad ; Salleh, Mohamad Mat

  • Author_Institution
    Phys. Dept., Univ. Kebangsaan, Malaysia
  • fYear
    1996
  • fDate
    26-28 Nov 1996
  • Firstpage
    229
  • Lastpage
    233
  • Abstract
    The Sb-doped SnO2 thin films have been developed for gas sensors applications. The mechanism of sensing is based on the absorption and desorption of gases on the film´s surface that change the electrical resistivity of the films. Thin films of SnO2 were prepared on the glass slide substrates by spray pyrolysis method. They are very sensitive to O2 and CO2 and less sensitive to N2 gas. The basic principles of the mechanism of action are described in detail
  • Keywords
    antimony; desorption; gas sensors; pyrolysis; semiconductor thin films; spray coating techniques; 2000 to 5000 angstrom; CO2; N2; O2; SnO2:Sb; absorption; desorption; electrical resistivity; gas sensor; semiconductor thin films; spray pyrolysis method; Absorption; Electric resistance; Electrical resistance measurement; Gas detectors; Gases; Resistors; Spraying; Substrates; Thin film sensors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics, 1996. ICSE '96. Proceedings., 1996 IEEE International Conference on
  • Conference_Location
    Penang
  • Print_ISBN
    0-7803-3388-8
  • Type

    conf

  • DOI
    10.1109/SMELEC.1996.616488
  • Filename
    616488
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3497282