DocumentCode
3497343
Title
Parametrically driven resonant micro-mirror scanner with tunable springs
Author
Jinhyeok Kim ; Kawai, Yusuke ; Inomata, N. ; Ono, Takahito
Author_Institution
Tohoku Univ., Sendai, Japan
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
580
Lastpage
583
Abstract
In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.
Keywords
microactuators; micromirrors; optical parametric amplifiers; optical pumping; optical scanners; electrothermal actuator; parametric amplification; parametrically driven resonant micromirror scanner; pumping signal; resonant frequency; spring constant; stress generation; torsion bars; torsional modes; tunable springs; vibration amplitude; Actuators; Force; Laser beams; Mirrors; Resonant frequency; Springs; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474308
Filename
6474308
Link To Document