Pneumatic-less high-speed vacuum meso-pump driven by programmable hydraulics

We present the full testing and characterization results of a pneumatic-less high-speed roughing (vacuum) meso-pump that demonstrates, within our knowledge, the best near-atmosphere performance-up to date while obviating the conventional dependence on pneumatics (e.g. gas cylinders). The roughing pump operates completely all-electrically by manipulating multiple micro membranes utilizing only a single electromagnetic actuator, thus in the smallest packaged volume (22.8cc) of the same kinds while achieving a record vacuum of 206 torr within only 5 minutes. The single actuator operation is enabled by developing programmable micro hydraulics designs where multiple pump membranes were passively-controlled with designed time delays in a desired sequence. The fabricated prototype produced the maximum flow rate of 11.56 sccm at 50 Hz electromagnetic driving frequency; continually operated over 466 hours; and successfully demonstrated the timed actuation of multiple membranes utilizing only a single electromagnetic actuator.