DocumentCode :
3497446
Title :
5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection
Author :
Xiong, Zheng-Mei ; Mairiaux, Estelle ; Walter, Bohme ; Faucher, Marc ; Buchaillot, Lionel ; Legrand, B.
Author_Institution :
NAM6 Group, Inst. d´´Electron., de Microelectron. et de Nanotechnol., France
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
592
Lastpage :
595
Abstract :
We report on a new concept of Atomic Force Microscope (AFM) oscillating probes using dog-bone resonator with thermal excitation and piezoresistive detection. The resonance frequency is 5.4 MHz and the quality factor is measured about 4,000 in air. AFM images are obtained over PMMA resist sample and the force resolution deduced from the measurement is about 320 pN/Hz0.5.
Keywords :
Q-factor; atomic force microscopy; piezoresistive devices; resonators; PMMA resist sample; atomic force microscope images; dog-bone oscillating atomic force microscope probe; dog-bone resonator; force resolution; frequency 5.4 MHz; piezoresistive detection; quality factor; resonance frequency; thermal actuation; thermal excitation; Force; Frequency measurement; Piezoresistance; Probes; Q factor; Resonant frequency; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474311
Filename :
6474311
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3497446
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