Quadrature FM gyroscope

A dual mass vibratory gyroscope sensor demonstrates the quadrature frequency modulated (QFM) operating mode, where the frequency of the circular orbit of a proof mass is measured to detect angular rate. In comparison to the mode-matched open loop rate mode, the QFM mode receives the same benefit of improved SNR but without the penalties of unreliable scale factor and decreased bandwidth. A matched pair of gyroscopes, integrated onto the same die, is used for temperature compensation, resulting in 6 ppb relative frequency tracking error, or an Allan deviation of 370 deg/hr with a 70 kHz resonant frequency. The integrated CMOS electronics achieve a capacitance resolution of 0.1 zF/rt-Hz with nominal 6 fF sense electrodes.