• DocumentCode
    3497522
  • Title

    Optical accelerometer with mechanical amplification via a V-beam mechanism

  • Author

    Davies, Ernest ; George, D.S. ; Gower, M.C. ; Holmes, A.S.

  • Author_Institution
    EEE Dept., Imperial Coll. London, London, UK
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    609
  • Lastpage
    612
  • Abstract
    A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4.
  • Keywords
    accelerometers; beams (structures); Fabry-Pérot optical accelerometer; V-beam mechanism; mechanical amplification; proof mass displacement; Accelerometers; Optical device fabrication; Optical fiber amplifiers; Optical fiber sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474315
  • Filename
    6474315