DocumentCode
3497522
Title
Optical accelerometer with mechanical amplification via a V-beam mechanism
Author
Davies, Ernest ; George, D.S. ; Gower, M.C. ; Holmes, A.S.
Author_Institution
EEE Dept., Imperial Coll. London, London, UK
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
609
Lastpage
612
Abstract
A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4.
Keywords
accelerometers; beams (structures); Fabry-Pérot optical accelerometer; V-beam mechanism; mechanical amplification; proof mass displacement; Accelerometers; Optical device fabrication; Optical fiber amplifiers; Optical fiber sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474315
Filename
6474315
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