Title :
Optimization of two-element flow sensors by numerical simulations
Author :
Nagata, Mitsuhiko ; Stevens, Malcolm ; Swart, Nicholas ; Dravia, Thngaraj ; Nathan, Arokia
Author_Institution :
Control Products. Div., Yamatake Corp, Kanagawa, Japan
Abstract :
Simulation and measurement results are presented for a two-element boundary layer flow sensor fabricated using silicon semiconductor processing and micromachining technologies. The sensor is located on a thermally isolated membrane and utilizes platinum-based resistive heating and sensing elements. Device optimization is based on quasi-3D numerical solutions of the electrothermal equations governing heat transport. We investigate the effects of geometrical non-idealities on the output response and offset. The results corroborate well with measurement data for a large range of operating voltages and flow velocities
Keywords :
boundary layers; differential equations; flowmeters; geometry; heat transfer; heating elements; membranes; micromachining; microsensors; numerical analysis; optimisation; semiconductor technology; Pt; Si; device optimization; electrothermal equations; flow velocity; geometrical nonidealities; heat transport; measurement data; micromachining; offset; operating voltage; output response; quasi-3D numerical simulations; resistive heating elements; resistive sensing elements; semiconductor processing; thermally isolated membrane; two-element boundary layer flow sensor; Biomembranes; Electrothermal effects; Fluid flow measurement; Heating; Isolation technology; Micromachining; Numerical simulation; Silicon; Thermal resistance; Thermal sensors;
Conference_Titel :
Emerging Technologies and Factory Automation, 1999. Proceedings. ETFA '99. 1999 7th IEEE International Conference on
Conference_Location :
Barcelona
Print_ISBN :
0-7803-5670-5
DOI :
10.1109/ETFA.1999.815379
