• DocumentCode
    3498543
  • Title

    Substrate Transfer: an Enabling Technology for System-in-Package Solutions

  • Author

    Dekker, R. ; Dümling, M. ; Fock, J.-H. ; Haartsen, J.R. ; Maas, H.G.R. ; Michielsen, T.M. ; Pohlmann, H. ; Schnitt, W. ; Tombeur, A.M.H.

  • Author_Institution
    Philips Res., Eindhoven
  • fYear
    2006
  • fDate
    8-10 Oct. 2006
  • Firstpage
    1
  • Lastpage
    8
  • Abstract
    A simple and robust technology for the transfer of circuits, processed on normal silicon wafers, to alternative substrates is presented. Substrate transfer technology (STT) is a post-processing technology based on adhesive bonding using a UV curing adhesive. The authors demonstrate that STT can be used for the elimination of RF substrate losses, for double sided device processing and for the fabrication of flexible circuits and thermal sensors and actuators. The successful industrialization of the process demonstrates that STT is indeed a viable option for high-yield, low-cost mass production
  • Keywords
    adhesive bonding; curing; substrates; system-in-package; UV curing adhesive; adhesive bonding; post-processing technology; semiconductor device bonding; semiconductor device fabrication; silicon on insulator technology; substrate transfer technology; system-in-package solutions; Actuators; Curing; Fabrication; Flexible printed circuits; Mass production; Radio frequency; Robustness; Silicon; Thermal sensors; Wafer bonding; Semiconductor device bonding; Semiconductor device fabrication; Silicon on insulator technology; Thermoelectric devices; Transducers; bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Bipolar/BiCMOS Circuits and Technology Meeting, 2006
  • Conference_Location
    Maastricht
  • ISSN
    1088-9299
  • Print_ISBN
    1-4244-0458-4
  • Electronic_ISBN
    1088-9299
  • Type

    conf

  • DOI
    10.1109/BIPOL.2006.311141
  • Filename
    4100209