DocumentCode
3498543
Title
Substrate Transfer: an Enabling Technology for System-in-Package Solutions
Author
Dekker, R. ; Dümling, M. ; Fock, J.-H. ; Haartsen, J.R. ; Maas, H.G.R. ; Michielsen, T.M. ; Pohlmann, H. ; Schnitt, W. ; Tombeur, A.M.H.
Author_Institution
Philips Res., Eindhoven
fYear
2006
fDate
8-10 Oct. 2006
Firstpage
1
Lastpage
8
Abstract
A simple and robust technology for the transfer of circuits, processed on normal silicon wafers, to alternative substrates is presented. Substrate transfer technology (STT) is a post-processing technology based on adhesive bonding using a UV curing adhesive. The authors demonstrate that STT can be used for the elimination of RF substrate losses, for double sided device processing and for the fabrication of flexible circuits and thermal sensors and actuators. The successful industrialization of the process demonstrates that STT is indeed a viable option for high-yield, low-cost mass production
Keywords
adhesive bonding; curing; substrates; system-in-package; UV curing adhesive; adhesive bonding; post-processing technology; semiconductor device bonding; semiconductor device fabrication; silicon on insulator technology; substrate transfer technology; system-in-package solutions; Actuators; Curing; Fabrication; Flexible printed circuits; Mass production; Radio frequency; Robustness; Silicon; Thermal sensors; Wafer bonding; Semiconductor device bonding; Semiconductor device fabrication; Silicon on insulator technology; Thermoelectric devices; Transducers; bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Bipolar/BiCMOS Circuits and Technology Meeting, 2006
Conference_Location
Maastricht
ISSN
1088-9299
Print_ISBN
1-4244-0458-4
Electronic_ISBN
1088-9299
Type
conf
DOI
10.1109/BIPOL.2006.311141
Filename
4100209
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