Title :
Substrate Transfer: an Enabling Technology for System-in-Package Solutions
Author :
Dekker, R. ; Dümling, M. ; Fock, J.-H. ; Haartsen, J.R. ; Maas, H.G.R. ; Michielsen, T.M. ; Pohlmann, H. ; Schnitt, W. ; Tombeur, A.M.H.
Author_Institution :
Philips Res., Eindhoven
Abstract :
A simple and robust technology for the transfer of circuits, processed on normal silicon wafers, to alternative substrates is presented. Substrate transfer technology (STT) is a post-processing technology based on adhesive bonding using a UV curing adhesive. The authors demonstrate that STT can be used for the elimination of RF substrate losses, for double sided device processing and for the fabrication of flexible circuits and thermal sensors and actuators. The successful industrialization of the process demonstrates that STT is indeed a viable option for high-yield, low-cost mass production
Keywords :
adhesive bonding; curing; substrates; system-in-package; UV curing adhesive; adhesive bonding; post-processing technology; semiconductor device bonding; semiconductor device fabrication; silicon on insulator technology; substrate transfer technology; system-in-package solutions; Actuators; Curing; Fabrication; Flexible printed circuits; Mass production; Radio frequency; Robustness; Silicon; Thermal sensors; Wafer bonding; Semiconductor device bonding; Semiconductor device fabrication; Silicon on insulator technology; Thermoelectric devices; Transducers; bonding;
Conference_Titel :
Bipolar/BiCMOS Circuits and Technology Meeting, 2006
Conference_Location :
Maastricht
Print_ISBN :
1-4244-0458-4
Electronic_ISBN :
1088-9299
DOI :
10.1109/BIPOL.2006.311141