• DocumentCode
    3498667
  • Title

    Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

  • Author

    Zhiyuan Shen ; Shuwei Liu ; Jianmin Miao ; Lye Sun Woh ; Zhihong Wang

  • Author_Institution
    Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    821
  • Lastpage
    824
  • Abstract
    This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified.
  • Keywords
    diaphragms; electrodes; energy harvesting; piezoelectric transducers; vibrations; optimal resistance load; proof mass effects; spiral electrode d33 mode piezoelectric diaphragm-based energy harvester; vibration energy conversion microstructure; working frequency; Acceleration; Electrodes; Energy harvesting; Resistance; Resonant frequency; Spirals; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474369
  • Filename
    6474369
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3498667