All-polymer soft-X-ray-charged piezoelectret with embedded PEDOT electrode

Author

Yue Feng ; Suzuki, Yuya

Author_Institution

Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

865

Lastpage

868

Abstract

In this paper, we propose MEMS-based all-polymer piezoelectret for vibration-driven energy harvesting. With trench-filled cellular parylene electret charged with soft X-ray, output power of 75 nW has been obtained by the microfabricated piezoelectret energy harvester at the resonant frequency of 149 Hz and 1.5 g acceleration. We also propose an improved cellular polymer structure with embedded PEDOT electrodes for higher surface charge density and thus higher power output. We have successfully microfabricated an early prototype with embedded PEDOT and obtained high surface potential of -50 V, showing the effectiveness of embedded PEDOT electrodes.

Keywords

electrets; embedded systems; energy harvesting; microelectrodes; microfabrication; micromechanical devices; piezoelectric devices; polymer foams; MEMS-based all-polymer piezoelectret; all-polymer soft-x-ray-charged piezoelectret; cellular polymer structure; embedded PEDOT electrodes; embedded pedot electrode; frequency 149 Hz; high surface potential; piezoelectret energy harvester microfabrication; power output; surface charge density; trench-filled cellular parylene electret; vibration-driven energy harvesting; voltage -50 V; Electrets; Electric potential; Electrodes; Silicon; Springs; Surface treatment; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474380

Filename

6474380