A flexible implantable micro temperature sensor on polymer capillary for biomedical applications

A flexible implantable micro temperature sensor has been proposed and fabricated on a polymer capillary by surface micromachining. The dynamic temperature response of the sensor when used in the hyperthermia is simulated and analyzed. The micro sensor has been successfully fabricated by our developed cylindrical projection lithography system. Platinum film is used as the sensing element material considering its good stability and linear resistance-temperature relationship. The temperature coefficient of resistance (TCR) and the current-voltage curves of the sensor prototype have been tested and evaluated. The test average TCR value derived from the fitted line is 0.0035/°C, which has a good agreement with industry standard value of the bulk Pt resistor sensor. The present flexible micro temperature sensor could be widely used as a precise implantable monitoring device in various biomedical applications.