Title :
BC412 bar code for silicon wafers
Author :
Chen, C.L. ; Hsiao, M.Y. ; Bossen, D.C.
Author_Institution :
IBM Corp., Poughkeepsie, NY, USA
Abstract :
The authors present a newly invented BC412 bar code for silicon wafer identification in automated semiconductor manufacturing floor control systems. This code has been tested and has been approved to be a SEMI standard in June 1992. It is a very important technology breakthrough and expected to be used by all semiconductor wafer manufacturers. The technical details of BC412 are presented.
Keywords :
bar codes; integrated circuit manufacture; manufacturing computer control; semiconductor technology; standardisation; BC412 bar code; Si wafers; automated semiconductor manufacturing; elemental semiconductors; floor control systems; single width bar code; wafer identification; Automatic control; Bars; Code standards; Conducting materials; Control systems; Manufacturing automation; Optical character recognition software; Semiconductor device manufacture; Silicon; Testing;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1993. Proceedings of Technical Papers. 1993 International Symposium on
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-0978-2
DOI :
10.1109/VTSA.1993.263655
