DocumentCode
3499602
Title
A 3D metallic structure array for refractive index sensing with optical vortex
Author
Maeda, Etsuo ; Lee, Youngjoo ; Ho, Ya-Fang ; Fujikawa, S. ; Delaunay, Jean-Jacques
Author_Institution
Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
973
Lastpage
976
Abstract
A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We show that the position of the dip wavelength is sensitive to change in the refractive index of the surrounding medium. Sensitivity to change in the refractive index was quantified by optical simulation and experimental measurements.
Keywords
optical sensors; optical vortices; photolithography; refractive index measurement; sensor arrays; 3D metallic structure array; dip wavelength; high-aspect-ratio metallic fins; large-scale fabrication technique; light confinement; optical simulation; optical vortex; photolithography process; reflection spectrum; refractive index sensing; surrounding medium; three dimensional structure arrays; Arrays; Optical refraction; Optical sensors; Optical variables control; Optical vortices; Reflectivity; Refractive index;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474409
Filename
6474409
Link To Document