• DocumentCode
    3499602
  • Title

    A 3D metallic structure array for refractive index sensing with optical vortex

  • Author

    Maeda, Etsuo ; Lee, Youngjoo ; Ho, Ya-Fang ; Fujikawa, S. ; Delaunay, Jean-Jacques

  • Author_Institution
    Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    973
  • Lastpage
    976
  • Abstract
    A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We show that the position of the dip wavelength is sensitive to change in the refractive index of the surrounding medium. Sensitivity to change in the refractive index was quantified by optical simulation and experimental measurements.
  • Keywords
    optical sensors; optical vortices; photolithography; refractive index measurement; sensor arrays; 3D metallic structure array; dip wavelength; high-aspect-ratio metallic fins; large-scale fabrication technique; light confinement; optical simulation; optical vortex; photolithography process; reflection spectrum; refractive index sensing; surrounding medium; three dimensional structure arrays; Arrays; Optical refraction; Optical sensors; Optical variables control; Optical vortices; Reflectivity; Refractive index;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474409
  • Filename
    6474409