Development of MWCNT embedded micromechanical resonator working as rarefied gas sensor

Author

Kishihara, Hiroyuki ; Hanasaki, Itsuo ; Matsuzuka, N. ; Yamashita, Ichiro ; Uraoka, Y. ; Isono, Y.

Author_Institution

Kobe Univ., Kobe, Japan

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

985

Lastpage

988

Abstract

This research has newly developed the multi-wall carbon nanotubes (MWCNTs) embedded-micro-mechanical resonator working as a novel rarefied gas sensor. The inertial effect of rarefied gas fluid is detected as a variation of the resonance frequency, and the dissipation of the interaction energy between the resonator and the gas molecules affects the damping of oscillation. Thus, two kinds of gaseous species can be distinguished with one device. The MWCNTs have been arranged on the resonator for heightening its sensitivity by the bio-MEMS compatible process. The MWCNTs embedded-resonator has successfully demonstrated to detect and distinguish hydrogen and nitrogen gases under pressures of 0.02 Pa to 0.9 Pa.

Keywords

carbon nanotubes; gas sensors; hydrogen; microfabrication; micromechanical resonators; microsensors; nitrogen; C; H₂; MWCNT embedded micromechanical resonator; N; bioMEMS compatible process; gas molecule; inertial effect; interaction energy dissipation; multiwall carbon nanotube; oscillation damping; pressure 0.02 Pa to 0.9 Pa; rarefied gas fluid detection; rarefied gas sensor; Coatings; Damping; Hydrogen; Proteins; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474412

Filename

6474412