Title :
Endoscopic optical probes for linear and rotational scanning
Author :
Weber, N. ; Zappe, H. ; Seifert, Andreas
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
Two fully integrated optical microprobes, based on an advanced silicon optical bench (SiOB) technology, are developed for endoscopic OCT (optical coherence tomography). The probes incorporate diverse optical components and scan mechanics, such as magnetostatic micromirrors and rotating prisms, to realize linear side-looking and rotational scanning. The outer diameter of the assembled systems is below 2.75 mm allowing integration into the 3mm working channels of commercial endoscopes.
Keywords :
biomedical optical imaging; elemental semiconductors; endoscopes; integrated optics; micromirrors; optical prisms; optical tomography; silicon; Si; advanced silicon optical bench technology; assembled systems; commercial endoscopes; diverse optical components; endoscopic OCT; endoscopic optical probes; fully integrated optical microprobes; linear scanning; linear side-looking; magnetostatic micromirrors; optical coherence tomography; rotating prisms; rotational scanning; scan mechanics; size 3 mm; working channels; Magnetic resonance imaging; Magnetostatics; Optical device fabrication; Optical imaging; Probes; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474433
