Title :
Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans
Author :
Lin Liu ; Erkang Wang ; Xiaoyang Zhang ; Yiqi Tang ; Huikai Xie
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
A fiber-optic confocal microendoscope with MEMS scanners for both lateral and axial scan is presented. The MEMS 3D scan engine achieves a lateral scan range of over ± 26° with a 2D MEMS mirror and a depth scan of over 400 μm with a 1D MEMS tunable lens. Both 2D and 3D confocal images of micro-particles and acute rat brain tissue have been obtained.
Keywords :
bioMEMS; biological tissues; biomedical optical imaging; brain; endoscopes; microlenses; micromirrors; optical fibres; 1D MEMS tunable lens; 2D MEMS mirror; MEMS 3D scan engine; MEMS scanners; acute rat brain tissue; axial scans; confocal microendoscopic 3D imaging; depth scan; fiber-optic confocal microendoscope; lateral scans; microparticles; Actuators; Image resolution; Lenses; Micromechanical devices; Microscopy; Mirrors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474438
