Title :
IEEE/SEMI International Semiconductor Manufacturing Science Symposium (Cat. No.93CH3280-5)
Abstract :
The following topics were dealt with: process monitoring; process characterization; manufacturing operations control; business partnerships; and semiconductor manufacturing change mechanisms
Keywords :
integrated circuit manufacture; management; manufacturing computer control; production control; semiconductor device manufacture; business partnerships; change mechanisms; manufacturing operations control; process characterization; process monitoring; semiconductor manufacturing;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1993. ISMSS 1993., IEEE/SEMI International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-1212-0
DOI :
10.1109/ISMSS.1993.263710
