• DocumentCode
    3500496
  • Title

    CMOS scaling for the 22nm node and beyond: Device physics and technology

  • Author

    Kuhn, Kelin J.

  • Author_Institution
    Logic Technol. Dev., Intel Corp., Hillsboro, OR, USA
  • fYear
    2011
  • fDate
    25-27 April 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper reviews options for CMOS scaling for the 22nm node and beyond. Advanced transistor architectures such as ultra-thin body (UTB), FinFET, gate-all-around (GAA) and vertical options are discussed. Technology challenges faced by all architectures (such as variation, resistance, and capacitance) are analyzed in relation to recent research results. The impact on the CMOS scaling roadmap of system-on-chip (SOC) technologies is reviewed.
  • Keywords
    CMOS integrated circuits; system-on-chip; transistor circuits; CMOS scaling; advanced transistor architectures; device physics; system-on-chip; CMOS integrated circuits; Capacitance; Logic gates; Materials; Strain; System-on-a-chip; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems and Applications (VLSI-TSA), 2011 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1524-766X
  • Print_ISBN
    978-1-4244-8493-5
  • Type

    conf

  • DOI
    10.1109/VTSA.2011.5872206
  • Filename
    5872206