Title :
Multi nozzle electrohydrodynamic inkjet printing head by batch fabrication
Author :
Lee, K.I. ; Lim, B. ; Lee, Hongseok ; Kim, S.H. ; Lee, Chris S. ; Cho, J.W. ; Chung, Shi-Uk ; Hong, Yiguang
Author_Institution :
Korea Electron. Technol. Inst., Seongnam, South Korea
Abstract :
We report a multi nozzle electrohydrodynamic (EHD) printing head by using batch fabrication for the first time. Inks can be ejected from a glass nozzle by applied large electric field. Tiny nozzles with a outer diameter of 100 microns are fabricated by sand blasting on a glass wafer. A stable continuous jetting with a commercial carbon black ink was observed. Continuous lines with a width of 30 microns on a silicon wafer were printed simultaneously with a DC bias voltage of 1.7 kV at the stage speed of 500 mm/s. Separated dot patterns with a diameter of 20 microns were printed with various jetting frequency up to 10 kHz on a super-hydropobic teflon coated silicon wafer. Also continuous line width can be reduced to 20 microns on a hydrophobic surface.
Keywords :
coatings; electrohydrodynamics; elemental semiconductors; glass; hydrophobicity; ink jet printing; jets; nozzles; silicon; DC bias voltage; EHD; Si; batch fabrication; carbon black ink; continuous line width; electric field; glass nozzle; glass wafer; hydrophobic surface; jetting; multinozzle electrohydrodynamic inkjet printing head; sand blasting; separated dot pattern; size 100 micron; size 20 micron; size 30 micron; superhydropobic teflon coated silicon wafer; velocity 500 mm/s; voltage 1.7 kV; Electrohydrodynamics; Etching; Fabrication; Glass; Ink; Printing; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474458