Subsurface tomography imaging at sub-terahertz and terahertz frequency

Development of millimeter and sub-millimeter wavelengths technologies is one of the most promising research areas, especially for applications in so called terahertz imaging. In the paper we consider a tomography approach for obtaining 3-D imaging in frequency range from 100 GHz up to 325 GHz. We apply the modernized image reconstruction method, based on developed earlier, for low frequency, surface imaging procedure. We managed to significantly improve the image resolution by newly designed probes for millimeter and submillimeter wave range measurements. The images obtained demonstrate that the built measurement system and the image reconstruction method can be used for non-destructive testing applications such as the imaging of manufacturing defect on wafer.