• DocumentCode
    3500882
  • Title

    A systematic study of I/O device designs for TSV-based 3D chip stacking

  • Author

    Kang, C.Y. ; Park, H-K ; Singh, P. ; Smith, L. ; Arkalgud, S. ; Kirsch, P.D. ; Jammy, R.

  • Author_Institution
    SEMATECH, Austin, TX, USA
  • fYear
    2011
  • fDate
    25-27 April 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A systematic study of I/O device designs for TSV 3D chip stacking is reported. For the primary ESD circuit using SCR, a twin well structure results in minimal transient overshoot current and voltage while its triggering voltage is higher than in Deep N-well (DNW) structures. For nMOSFET-based secondary ESD circuit components, the DNW should be applied to handle the current overshoot and the design rule should be further scaled.
  • Keywords
    electrostatic discharge; integrated circuit design; stacking; three-dimensional integrated circuits; thyristors; ESD circuit; I/O device design; TSV 3D chip stacking; deep N-well; silicon-controlled rectifier; triggering voltage; Electrostatic discharge; Fluctuations; Heating; Substrates; Through-silicon vias; Thyristors; Transient analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems and Applications (VLSI-TSA), 2011 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1524-766X
  • Print_ISBN
    978-1-4244-8493-5
  • Type

    conf

  • DOI
    10.1109/VTSA.2011.5872225
  • Filename
    5872225