DocumentCode :
3501004
Title :
Physics of laser ablation plasma plumes for deposition of diamond-like carbon films under magnetized and field-free conditions
Author :
Haverkamp, J.D. ; Bourham, M.A. ; Narayan, J.
Author_Institution :
Dept. of Nucl. Eng., North Carolina State Univ., Raleigh, NC, USA
fYear :
2004
fDate :
1-1 July 2004
Firstpage :
147
Abstract :
Summary form only given. Pulsed laser deposition has been proven to be a useful technique for the synthesis of high quality diamond-like carbon films. In order to understand the mechanisms by which diamond-like carbon films grow, it is necessary to understand the physics of laser ablation plasmas. Quadruple Langmuir probes and optical spectroscopy are used to investigate the plasma created from ultraviolet laser ablation of a carbon target. A KrF excimer laser is used in this experiment with the laser energy varied between 300-1000 mJ. The laser spot sizes on the target were 0.22, 0.26 and 0.29 cm/sup 2/. Electron temperature, ion density, ion flow speed, and plume forward peaking factor are found as functions of laser energy density and spot size at various locations from the target surface. The results are found to be consistent with adiabatic expansion of the plume. Recently, the addition of a magnetic field has been employed to possibly steer the plume to remove macroscopic particulates. The effect of the addition of a 0.4 T magnetic field oriented perpendicular to the flow has been examined with quadruple Langmuir probes, magnetic probes, and optical spectroscopy. The plume behavior is quite different under the influence of the magnetic field. For instance, electron temperatures are found to increase significantly from the field-free case. It is postulated that this is due to magnetic field line diffusion in to the plume. The ion density traces indicate the presence of an instability not seen in the field-free case.
Keywords :
Langmuir probes; diamond-like carbon; plasma density; plasma instability; plasma magnetohydrodynamics; plasma production by laser; plasma temperature; plasma transport processes; pulsed laser deposition; thin films; 0.4 T; 300 to 1000 mJ; C; KrF excimer laser; adiabatic expansion; diamond-like carbon films deposition; diffusion; electron temperature; field-free condition; ion density; ion flow; laser ablation plasma plumes; laser energy density; laser spot size; magnetic probes; magnetised condition; optical spectroscopy; perpendicularly oriented magnetic field; plasma instability; plume forward peaking factor; pulsed laser deposition; quadruple Langmuir probes; ultraviolet laser ablation; Diamond-like carbon; Laser ablation; Laser theory; Magnetic fields; Optical films; Physics; Plasma temperature; Probes; Pulsed laser deposition; Spectroscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location :
Baltimore, MD, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-8334-6
Type :
conf
DOI :
10.1109/PLASMA.2004.1339678
Filename :
1339678
Link To Document :
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