Title :
The electron optics properties of micro-column with field emitter
Author :
Neo, Yoichiro ; Koike, Akifumi ; Fujino, Takahiro ; Mimura, Hidenori ; Yoshida, Tomoya ; Nishi, Takashi ; Nagao, Masayoshi ; Murata, Hidekazu
Author_Institution :
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
Abstract :
We successfully demonstrated the electron optics properties of newly designed micro-column in this report. The micro-column consisted of an electron gun and objective lens. The electron gun was structured with FEA and condenser lens. The each structure was optimized in order to perform each abilities and not to disturb other´s function. It was confirmed that the diameter of focused beam was around 40μm at 2mm of working distance under 400 times magnification and free electrical field.
Keywords :
electron guns; electron optics; field emitter arrays; lenses; micro-optics; optical design techniques; optical focusing; FEA; condenser lens; distance 2 mm; electron gun; electron optics; field emitter; focused beam; free electrical field; microcolumn design; objective lens; working distance; Acceleration; Anodes; Electric fields; Electron beams; Focusing; Lenses; condeser lens objective lens; field emitter array; lithography; micro-column;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316841
