The electron optics properties of micro-column with field emitter

Author

Neo, Yoichiro ; Koike, Akifumi ; Fujino, Takahiro ; Mimura, Hidenori ; Yoshida, Tomoya ; Nishi, Takashi ; Nagao, Masayoshi ; Murata, Hidekazu

Author_Institution

Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

2

Abstract

We successfully demonstrated the electron optics properties of newly designed micro-column in this report. The micro-column consisted of an electron gun and objective lens. The electron gun was structured with FEA and condenser lens. The each structure was optimized in order to perform each abilities and not to disturb other´s function. It was confirmed that the diameter of focused beam was around 40μm at 2mm of working distance under 400 times magnification and free electrical field.

Keywords

electron guns; electron optics; field emitter arrays; lenses; micro-optics; optical design techniques; optical focusing; FEA; condenser lens; distance 2 mm; electron gun; electron optics; field emitter; focused beam; free electrical field; microcolumn design; objective lens; working distance; Acceleration; Anodes; Electric fields; Electron beams; Focusing; Lenses; condeser lens objective lens; field emitter array; lithography; micro-column;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2012 25th International

Conference_Location

Jeju

ISSN

pending

Print_ISBN

978-1-4673-1983-6

Electronic_ISBN

pending

Type

conf

DOI

10.1109/IVNC.2012.6316841

Filename

6316841