• DocumentCode
    3503841
  • Title

    Newly designed high resolution X-ray microscope with a liquid lithium field emission electron source

  • Author

    Hata, Koji ; Nagai, R. ; Nagai, Shuichi

  • Author_Institution
    Grad. Sch. of Electr. & Electron. Eng., Mie Univ., Tsu, Japan
  • fYear
    2012
  • fDate
    9-13 July 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Summary form only given. A development of high-resolution X-ray microscope with a new type of field emission electron source is now in progress. The X-ray microscope is equipped with a lithium liquid metal electron source (Li-LMES) as a high brightness source and the specially designed electron optics with scanning electron microscope function. In this talk, I will introduce the design concept of the X-ray microscope.
  • Keywords
    X-ray apparatus; X-ray microscopy; electron optics; electron sources; field emission electron microscopy; lithium; scanning electron microscopy; Li; Li-LMES; brightness source; electron optics; high resolution X-ray microscope; liquid lithium field emission electron source; lithium liquid metal electron source; scanning electron microscope function; Cathodes; Electron sources; Liquids; Lithium; Optical microscopy; Scanning electron microscopy; X-ray microscope; liquid metal electron source;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
  • Conference_Location
    Jeju
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-1983-6
  • Electronic_ISBN
    pending
  • Type

    conf

  • DOI
    10.1109/IVNC.2012.6316864
  • Filename
    6316864