DocumentCode
3503841
Title
Newly designed high resolution X-ray microscope with a liquid lithium field emission electron source
Author
Hata, Koji ; Nagai, R. ; Nagai, Shuichi
Author_Institution
Grad. Sch. of Electr. & Electron. Eng., Mie Univ., Tsu, Japan
fYear
2012
fDate
9-13 July 2012
Firstpage
1
Lastpage
2
Abstract
Summary form only given. A development of high-resolution X-ray microscope with a new type of field emission electron source is now in progress. The X-ray microscope is equipped with a lithium liquid metal electron source (Li-LMES) as a high brightness source and the specially designed electron optics with scanning electron microscope function. In this talk, I will introduce the design concept of the X-ray microscope.
Keywords
X-ray apparatus; X-ray microscopy; electron optics; electron sources; field emission electron microscopy; lithium; scanning electron microscopy; Li; Li-LMES; brightness source; electron optics; high resolution X-ray microscope; liquid lithium field emission electron source; lithium liquid metal electron source; scanning electron microscope function; Cathodes; Electron sources; Liquids; Lithium; Optical microscopy; Scanning electron microscopy; X-ray microscope; liquid metal electron source;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location
Jeju
ISSN
pending
Print_ISBN
978-1-4673-1983-6
Electronic_ISBN
pending
Type
conf
DOI
10.1109/IVNC.2012.6316864
Filename
6316864
Link To Document