• DocumentCode
    3505724
  • Title

    High tip density gated field emitter arrays: Different miniaturization approaches

  • Author

    Mustonen, Anna ; Kirk, Eugenie ; Guzenko, Vitaliy ; Spreu, Christian ; Soichiro, Tsujino ; Feurer, Thomas

  • Author_Institution
    Lab. for Micro- & Nanotechnol., Paul Scherrer Inst., Villigen, Switzerland
  • fYear
    2012
  • fDate
    9-13 July 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The authors present miniaturization approaches for field emitter arrays fabricated by molding technique. Gated all-metal field emitter arrays with submicron pitch and 200 nm emitter base size are successfully demonstrated.
  • Keywords
    field emitter arrays; field emitter array miniaturization approach; gated all-metal field emitter arrays; high tip density gated field emitter arrays; size 200 nm; Electron beams; Fabrication; Field emitter arrays; Lithography; Logic gates; Metals; Substrates; electron beam lithography; gated field emitter arrays; molding; nanoimprint planarization; submicron pitch;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
  • Conference_Location
    Jeju
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-1983-6
  • Electronic_ISBN
    pending
  • Type

    conf

  • DOI
    10.1109/IVNC.2012.6316954
  • Filename
    6316954
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3505724