Title :
Step-up voltage converter for mems actuators by piezoelectric transformers
Author :
Francois, Pigache ; Marek, Pokorny ; Marc, Cousineau ; Bertrand, Nogarede
Author_Institution :
LAPLACE, Univ. de Toulouse, Toulouse, France
Abstract :
This paper is about the validation of minimal electronic structure developed around piezoelectric transformer for high voltage mems supply. High voltage and compactness are main requirements leading to the development of electronic circuit. The selected solution is discussed and experimentally validated by a first prototype.
Keywords :
high-voltage techniques; microactuators; piezoelectric devices; power convertors; power transformers; electronic circuit; high voltage mems supply; mems actuators; minimal electronic structure; piezoelectric transformers; step-up voltage converter; Charge pumps; Electronic circuits; Electrostatic actuators; Frequency; Lithography; Low voltage; Packaging; Piezoelectric actuators; Pulse width modulation converters; Transformers;
Conference_Titel :
Industrial Electronics, 2009. IECON '09. 35th Annual Conference of IEEE
Conference_Location :
Porto
Print_ISBN :
978-1-4244-4648-3
Electronic_ISBN :
1553-572X
DOI :
10.1109/IECON.2009.5415036
