Preliminary characterization of the ion-sorption micropump

Author

Grzebyk, Tomasz ; Górecka-Drzazga, Anna ; Dziuban, Jan A.

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wrocław, Poland

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

2

Abstract

The microengineered miniature silicon-glass micropump has been shown for the first time ever. The device consists of lateral CNT-based cold cathode surrounded by an oval anode. Field-emitted electrons ionize residual gas particles, which are collected by a collecting electrode covered with active thin-film Ti getter co-operating with NEG getter (SAES, Italy). Preliminary results showed good pumping (~10^-4 hPa), about two orders of magnitude better then NEG getter can achieve.

Keywords

carbon nanotubes; electrodes; electron field emission; field ion emission; getters; glass; ion pumps; machinery production industries; microfabrication; micropumps; silicon; sorption; titanium; vacuum pumps; C; NEG getter; Si; Ti; active thin-film Ti; field-emitted electron ionize residual gas particle; ion-sorption micropump; lateral CNT-based cold cathode; microengineered miniature silicon-glass micropump; oval anode; preliminary characterization; Anodes; Cathodes; Gettering; Ions; Micropumps; Silicon; CNT; field emission; getter; vacuum micropump;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2012 25th International

Conference_Location

Jeju

ISSN

pending

Print_ISBN

978-1-4673-1983-6

Electronic_ISBN

pending

Type

conf

DOI

10.1109/IVNC.2012.6316986

Filename

6316986