Title :
1988 Solid State Sensor and Actuator Workshop. Technical Digest (Cat. No.88TH0215-4)
Abstract :
Presents the front cover of the conference proceedings.
Keywords :
detectors; electric actuators; electric sensing devices; elemental semiconductors; silicon; transducers; CMOS; VLSI sensors; accelerometers; actuators; arrays; biomedical sensors; chemical sensors; dielectric materials; gas flowmeters; high-temperature sensors; humidity sensors; interferometers; liquid-phase sensors; magnetic sensor arrays; mechanical properties of materials; microbridge; micromachining; micromechanisms; micrometers; microvalues; on-chip laser-trimming; optical fiber databases; photoresists; physical sensors; polycrystalline Si; pressure transducers; robots; solid state sensors; strain sensors; transistor noise;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26417
