Title :
Electrical characteristics of Al2O3 films using the sol-gel method
Author :
Kim, Sang-Jin ; Kim, Ki-Joon ; Seong, Nak-Jin ; Lee, Joon-Ung ; Korobova, N. ; Park, S.
Author_Institution :
Dept. of Eng., Junior Coll. of Inchon, Inchon, South Korea
Abstract :
Dielectric films have been prepared by the electrophoretic method from metal alkoxide solutions. The film formation process by hydrolysis of metal alkoxide/alcohol solutions consisted of 3 main stages: preparation of stable organosols with monodisperse particles; electrophoretic deposition; and dehydration of gel, which was formed after electrophoretic deposition on the stainless steel substrates. The authors investigated the influence of sol age on the quality of the films. It was also observed that internal structural variations in organosols significantly alter the sintering behavior of oxide films and affect their subsequent crystalline transformation. The formation properties of Al2O3 thin amorphous films and films armoured by “whiskers” are discussed
Keywords :
alumina; crystallisation; dielectric thin films; electric strength; electrophoretic coatings; permittivity; sintering; sol-gel processing; thermal analysis; Al2O3; Al2O3 films; Al2O3 thin amorphous films; DTA; TGA; crystalline transformation; dielectric constant; dielectric films; electric strength; electrical characteristics; electrophoretic deposition; gel dehydration; hydrolysis; internal structural variations; metal alkoxide solutions; monodisperse particles; sintering behavior; sol age; sol-gel method preparation; stable organosols; stainless steel substrates; whiskers; Coatings; Costs; Dielectric substrates; Electric variables; Electrodes; Infrared heating; Scanning electron microscopy; Shape; Steel; Temperature;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
0-7803-2651-2
DOI :
10.1109/ICPADM.1997.616577
