• DocumentCode
    3507016
  • Title

    Studies of a few monolayers of Cu/Brass on glass surfaces using AFM and TEM

  • Author

    Bahadori, F. ; Ghoranneviss, M. ; Mahmoudzadeh, M.

  • Author_Institution
    Plasma Phys. Res. Lab., Tehran, Iran
  • fYear
    2004
  • fDate
    1-1 July 2004
  • Firstpage
    303
  • Abstract
    Summary form only given. In this paper, a thick metal film (/spl sim/10 nm-1000 nm) is deposited at DC sputtering magnetron sets and the Copper film is formed by annealing at an elevated temperature. Studied of this solid-phase reaction have revealed the crucial role of material transport in the film but the underlying diffusion mechanisms still remained poorly understood. For ultra-thin Copper films deposited on Brass, the mechanisms governing this solid-phase reaction will likely to be different. In the present study, the initial stages of Cu growth on Brass and substrate were investigated. At high temperature, a complete reaction can be achieved giving rise to a perfect Cu/Brass grown film. Improvement of this upon annealing is characterized by an appreciable decrease of their full width at half maximum.
  • Keywords
    annealing; atomic force microscopy; brass; copper; diffusion; metallic thin films; monolayers; sputter deposition; transmission electron microscopy; 10 to 1000 nm; AFM; Cu growth; Cu-CuZn; Cu-brass monolayers; TEM; annealing; copper film; dc magnetron sputtering; diffusion mechanism; glass surfaces; material transport; solid-phase reaction; thick metal film; Annealing; Atomic force microscopy; Copper; Glass; Physics; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma temperature; Surface reconstruction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
  • Conference_Location
    Baltimore, MD, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-8334-6
  • Type

    conf

  • DOI
    10.1109/PLASMA.2004.1339980
  • Filename
    1339980