Title :
Silicon-based ultrasonic Lamb-wave multisensors
Author :
Wenzel, Stuart W. ; White, Richard M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Initial experimental, analytical, and numerical evaluations are described of a microsensor that uses ultrasonic Lamb wave propagating in a thin plate supported by a silicon die. Because it is sensitive to many measurands, the device could operate as a microphone, biosensor, chemical vapor or gas detector, scale, pressure sensor, densitometer, radiometer, or thermometer. Lamb waves offer unique means for obtaining selective response, and permit sensitive operation in the low MHz frequency range in vacuum, in a gas, or while immersed in a liquid.<>
Keywords :
detectors; silicon; surface acoustic wave devices; ultrasonic transducers; Si; biosensor; chemical vapour detector; densitometer; gas detector; microphone; microsensor; pressure sensor; radiometer; scale; thermometer; thin plate; ultrasonic Lamb-wave multisensors; Biosensors; Chemical and biological sensors; Chemical sensors; Density measurement; Gas detectors; Microphones; Microsensors; Pressure measurement; Silicon; Ultrasonic variables measurement;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26425
