Silicon-based ultrasonic Lamb-wave multisensors

Author

Wenzel, Stuart W. ; White, Richard M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1988

fDate

6-9 June 1988

Firstpage

27

Lastpage

30

Abstract

Initial experimental, analytical, and numerical evaluations are described of a microsensor that uses ultrasonic Lamb wave propagating in a thin plate supported by a silicon die. Because it is sensitive to many measurands, the device could operate as a microphone, biosensor, chemical vapor or gas detector, scale, pressure sensor, densitometer, radiometer, or thermometer. Lamb waves offer unique means for obtaining selective response, and permit sensitive operation in the low MHz frequency range in vacuum, in a gas, or while immersed in a liquid.<>

Keywords

detectors; silicon; surface acoustic wave devices; ultrasonic transducers; Si; biosensor; chemical vapour detector; densitometer; gas detector; microphone; microsensor; pressure sensor; radiometer; scale; thermometer; thin plate; ultrasonic Lamb-wave multisensors; Biosensors; Chemical and biological sensors; Chemical sensors; Density measurement; Gas detectors; Microphones; Microsensors; Pressure measurement; Silicon; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Conference_Location

Hilton Head Island, SC, USA

Type

conf

DOI

10.1109/SOLSEN.1988.26425

Filename

26425