DocumentCode
3509501
Title
Test methodologies for detecting ESD events in automated processing equipment
Author
Steinman, A. ; Bernier, J. ; Boehm, D. ; Albano, T. ; Tan, W. ; Pritchard, D.
Author_Institution
Ion Syst., Berkeley, CA, USA
fYear
1999
fDate
28-30 Sept. 1999
Firstpage
168
Lastpage
177
Abstract
ESD events cause device damage and equipment malfunctions in automated processing equipment. This paper surveys the problems caused by static charge in automated processing equipment. It looks at a number of test methods that detect those charges and the ESD events that occur in this equipment. It also provides examples of using these techniques to solve factory problems.
Keywords
computer integrated manufacturing; electronic equipment manufacture; electronic equipment testing; electrostatic discharge; production testing; ESD event detection; ESD events; automated processing equipment; charge detection; device damage; equipment malfunction; static charge; test methodologies; test methods; Automatic control; Automatic testing; Circuit testing; Electromagnetic interference; Electronic equipment manufacture; Electrostatic discharge; Electrostatic interference; Event detection; Production facilities; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999
Conference_Location
Orlando, FL, USA
Print_ISBN
1-58637-007-X
Type
conf
DOI
10.1109/EOSESD.1999.819003
Filename
819003
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