Issues concerning CDM ESD verification modules-the need to move to alumina

Author

Henry, Leo G. ; Kelly, Mark A. ; Diep, Tom ; Barth, Jon

Author_Institution

ORYX Instrum. Corp., Fremont, CA, USA

fYear

1999

fDate

28-30 Sept. 1999

Firstpage

203

Lastpage

211

Abstract

In this work, we demonstrate that both capacitance and inductance must be the central parameters associated with the charged device model (CDM) waveform verification modules. We also propose a change from the previously used FR-4 dielectric material substrate to a more stable alumina. This improves waveform repeatability and will lead to better correlation of test results. This paper completes the groundwork for a full ESDA CDM device testing standard.

Keywords

alumina; capacitance; electrostatic discharge; inductance; integrated circuit testing; standards; Al/sub 2/O/sub 3/; CDM ESD verification modules; ESDA CDM device testing standard; FR-4 dielectric material substrate; alumina; alumina dielectric material substrate; capacitance; charged device model; charged device model waveform verification modules; inductance; test result correlation; waveform repeatability; Capacitance; Current measurement; Dielectric materials; Electronic mail; Electrostatic discharge; Etching; Inductance; Instruments; Nickel; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999

Conference_Location

Orlando, FL, USA

Print_ISBN

1-58637-007-X

Type

conf

DOI

10.1109/EOSESD.1999.819006

Filename

819006