DocumentCode
351046
Title
A design and production framework for modular microsystems
Author
Grosser, Volker ; Michel, Bruno ; Reichl, Herbert
Author_Institution
Fraunhofer Inst. for Reliability & Microintegration, Berlin
fYear
1999
fDate
1999
Firstpage
193
Lastpage
198
Abstract
The trend to higher integration in microelectronics and the integration of micromechanical, microfluidic and microoptical components require new packaging solutions. A highly flexible design and production framework for microsystems, suitable for mid-scale production at reasonable costs, was developed
Keywords
economics; micromachining; micromechanical devices; modules; packaging; costs; integration; microelectronics; microfluidic components; micromechanical components; microoptical components; mid-scale production; modular microsystems; packaging; standardisation; Assembly; Control systems; Design engineering; Fabrication; Intelligent sensors; Manufacturing automation; Packaging; Production; Reliability engineering; Standardization;
fLanguage
English
Publisher
ieee
Conference_Titel
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-5790-6
Type
conf
DOI
10.1109/MHS.1999.820005
Filename
820005
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