The diagnosis of electron temperature in dielectric barrier discharge at atmospheric pressure

Summary form only given. Glow dielectric barrier discharge and dynamics of pattern appears as an attractive solution to realize an atmospheric pressure cold plasma process suitable for all the surface treatments including thin film coating and material making. Such development requires a large understanding of the DBD physics and chemistry. The objective of this work is to contribute to that understanding. We report results of the measurement of the spectrum from 690 nm to 800 nm of Ar DBD under atmosphere pressure. It is shown that the spectra are diverse depending on experimental conditions. The electron temperature T/sub e/ has been measured using intensity ratio (763.72 nm, 2P/sub 6//spl rarr/1S/sub 5/; 772.63 nm, 2P/sub 2//spl rarr/1S/sub 3/) by optical emission spectroscopy under different experimental conditions. It is shown that the temperature in flow-gas is lower than in stationary gas under the same conditions. Which is about 0.1 eV/spl sim/0.3 eV in flow-gas while 0.3 eV/spl sim/0.5 eV in stationary gas. But the spectrum line intensity ratio of 763.72 nm (2P/sub 6//spl rarr/1S/sub 5/, 13.172 eV) and 696.73 nm (2P/sub 2//spl rarr/1S/sub 5/, 13.328 eV) is less than 1 in flow gas while which is bigger than 1 in stationary gas at the same energy input. The results are likely to be explained by Penning ionization.