DocumentCode
3510643
Title
An advanced solid state pressure transducer for high reliability SSME applications
Author
Gustafson, G.E. ; Shea, J.J.
Author_Institution
Honeywell Inc., Plymouth, MN, USA
fYear
1988
fDate
6-9 June 1988
Firstpage
119
Lastpage
120
Abstract
The objective of this research project was to develop a silicon sensor and packaging technique to advance the state-of-the-art of pressure transducers for the NASA Space Shuttle main engine (SSME). This advancement is expected to yield improved reliability, accuracy, and cryogenic temperature operation. The author describes the silicon sensor, packaging concept, and the results from mechanical and electrical testing of development hardware.<>
Keywords
aerospace engines; electric sensing devices; elemental semiconductors; packaging; pressure transducers; semiconductor technology; silicon; NASA Space Shuttle main engine; Si; accuracy; aerospace engine; cryogenic temperature operation; electrical testing; mechanical testing; packaging; pressure transducers; reliability; Cryogenics; Engines; Mechanical sensors; NASA; Packaging; Silicon; Solid state circuits; Space shuttles; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Type
conf
DOI
10.1109/SOLSEN.1988.26454
Filename
26454
Link To Document