Title :
Disposable blood pressure sensors with digital on-chop laser trimming
Author :
Bryzek, J. ; Mayer, R. ; Barth, P.
Author_Institution :
NovaSensor, Fremont, CA, USA
Abstract :
A monolithic silicon pressure sensor with laser-trimmable calibration networks was developed for disposable use in invasive blood pressure monitoring. Laser trimming of the novel quasidigital on-chip resistor networks brings improved performance and short trim times for high production volumes. Incorporation of a small, square diaphragm for pressure sensing provides exceptionally high overpressure capability (10000 mm Hg), while the ability to laser-trim after packaging eliminates error associated with packaged-induced stresses. The chip offers low cost and high performance and is suitable for a variety of packages.<>
Keywords :
biomedical electronics; biomedical equipment; biomedical measurement; blood; electric sensing devices; laser applications in medicine; laser beam machining; monolithic integrated circuits; pressure transducers; 10000 mmHg; digital on-chop laser trimming; disposable use; invasive blood pressure monitoring; low cost; packaged-induced stresses; pressure sensing; quasidigital on-chip resistor networks; square diaphragm; Biomedical monitoring; Blood pressure; Calibration; Mercury (metals); Network-on-a-chip; Packaging; Production; Resistors; Silicon; Stress;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26455
