• DocumentCode
    3511044
  • Title

    13/sup th/ IEEE International Conference on Advanced Thermal Processing of Semiconductors

  • fYear
    2005
  • fDate
    4-7 Oct. 2005
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Thermal Processing of Semiconductors, 2005. RTP 2005. 13th IEEE International Conference on
  • Conference_Location
    Santa Barbara, CA
  • Print_ISBN
    0-7803-9223-X
  • Type

    conf

  • DOI
    10.1109/RTP.2005.1613669
  • Filename
    1613669
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3511044