DocumentCode
3511113
Title
Porous silicon ethanol vapor sensor
Author
Bow, Y.C. ; Kwok, W.M. ; Poon, M.C.
Author_Institution
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clear Water Bay, Hong Kong
fYear
1996
fDate
35245
Firstpage
13
Lastpage
16
Abstract
A novel very-large-scale-integrable porous Si based ethanol vapor sensor will be presented. It has simple structure, high sensitivity, fast and stable response for ethanol vapor sensing at room environment. To explain the sensor results, a model based on the interaction of adsorbed ethanol molecules and the porous Si layer will also be proposed
Keywords
elemental semiconductors; gas sensors; organic compounds; porous materials; semiconductor technology; silicon; I-V characteristics; Si; ethanol vapor sensor; porous silicon; sensor fabrication; sensor response; Chemical sensors; Chemical technology; Diodes; Ethanol; Fabrication; Gases; Passivation; Sensor phenomena and characterization; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1996., IEEE Hong Kong
Print_ISBN
0-7803-3091-9
Type
conf
DOI
10.1109/HKEDM.1996.566295
Filename
566295
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