DocumentCode
3511285
Title
Toward a novel planar circuit compatible silicon micromachined waveguide
Author
Becker, James P. ; Katehi, Linda P B
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fYear
1999
fDate
1999
Firstpage
221
Lastpage
224
Abstract
A novel, completely packaged planar-fed silicon micromachined waveguide/resonator is proposed. Simulated results for a Ka-band resonator are given, along with initial results of the required three-dimensional photolithographic patterning along sloping sidewalls
Keywords
cavity resonators; elemental semiconductors; micromachining; photolithography; semiconductor device packaging; silicon; waveguide transitions; waveguides; 3D photolithographic patterning; Ka-band resonator; Si; packaged planar-fed silicon micromachined waveguide/resonator; planar circuit compatible silicon micromachined waveguide; simulation; sloping sidewalls; Anisotropic magnetoresistance; Circuits; Dielectric losses; Electromagnetic waveguides; Etching; Planar transmission lines; Planar waveguides; Rectangular waveguides; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Performance of Electronic Packaging, 1999
Conference_Location
San Diego, CA
Print_ISBN
0-7803-5597-0
Type
conf
DOI
10.1109/EPEP.1999.819230
Filename
819230
Link To Document