The adhesion failure analysis of the MEMS gyroscope with comb capacitor

Author

Liang, X.J. ; Gao, S.Q.

Author_Institution

Dept. of Mechatronical Eng., Beijing Inst. of Technol., Beijing, China

fYear

2009

fDate

20-24 July 2009

Firstpage

1234

Lastpage

1236

Abstract

The MEMS gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of MEMS gyroscope is presented. In addition, the adhesion failure analysis is illustrated. Finally, a lateral comb capacitor structure to improve the reliability of the MEMS gyroscope is presented, the reliability of the lateral comb capacitor is discussed. The lateral comb capacitor structure is valuable for the optimize design of the other types of gyroscopes.

Keywords

adhesion; capacitors; failure analysis; gyroscopes; micromechanical devices; MEMS; adhesion; failure analysis; gyroscope; lateral comb capacitor; reliability; Adhesives; Capacitors; Circuit testing; Consumer electronics; Failure analysis; Gyroscopes; Humidity; Micromechanical devices; Optical microscopy; Reliability engineering; MEMS gyroscope; adhesion failure; lateral comb capacitor; reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability, Maintainability and Safety, 2009. ICRMS 2009. 8th International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4244-4903-3

Electronic_ISBN

978-1-4244-4905-7

Type

conf

DOI

10.1109/ICRMS.2009.5270042

Filename

5270042