Title :
The adhesion failure analysis of the MEMS gyroscope with comb capacitor
Author :
Liang, X.J. ; Gao, S.Q.
Author_Institution :
Dept. of Mechatronical Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
The MEMS gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of MEMS gyroscope is presented. In addition, the adhesion failure analysis is illustrated. Finally, a lateral comb capacitor structure to improve the reliability of the MEMS gyroscope is presented, the reliability of the lateral comb capacitor is discussed. The lateral comb capacitor structure is valuable for the optimize design of the other types of gyroscopes.
Keywords :
adhesion; capacitors; failure analysis; gyroscopes; micromechanical devices; MEMS; adhesion; failure analysis; gyroscope; lateral comb capacitor; reliability; Adhesives; Capacitors; Circuit testing; Consumer electronics; Failure analysis; Gyroscopes; Humidity; Micromechanical devices; Optical microscopy; Reliability engineering; MEMS gyroscope; adhesion failure; lateral comb capacitor; reliability;
Conference_Titel :
Reliability, Maintainability and Safety, 2009. ICRMS 2009. 8th International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-4903-3
Electronic_ISBN :
978-1-4244-4905-7
DOI :
10.1109/ICRMS.2009.5270042
