Development of a multi-level repulsive force out-of-plane micro electrostatic actuator

A multi-level repulsive force out-of-plane micro electrostatic actuator is presented. The actuator uses a repulsive force instead of an attractive force and avoids the ¿pull-in¿ effect associated with conventional parallel-plate micro electrostatic actuators. The multi-level actuator stroke is twice as large as that of a single-level 2-layer actuator when subject to the same voltage. Such actuators can be developed leading to a large stroke away from the substrate.