Title :
Design and fabrication of subwavelength diffractive optical elements in GaAs and fused silica
Author :
Bieber, A.E. ; Warren, M.E. ; Smith, Robert E. ; Castle, J.L. ; Wendt, J.R. ; Vawter, G. Allen
Author_Institution :
Sandia National Laboratories, Photonics Research Department
Keywords :
Gallium arsenide; Gratings; Laboratories; Lenses; Optical design; Optical device fabrication; Optical diffraction; Optical microscopy; Semiconductor materials; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.603423
