Title :
A MEMS capacitive, passively powered heart rate monitor: Design and analysis
Author :
Bassiachvili, Elena ; Stewart, Robert ; Shavezipur, Mohammad ; Nieva, Patricia
Author_Institution :
Mech. & Mechatron. Eng., Univ. of Waterloo, Waterloo, ON
Abstract :
A MEMS heart rate monitor has been designed for a three-structural-layer fabrication process such as PolyMUMPs. The device size is just over 400 mum times 400 mum. It uses a movable top plate in order to create a variable capacitance in conjunction with a coil for an inductance in order to create a resonant tank circuit. The circuit resonant frequency changes depending on the deflection of the top plate. The device is powered via the sensor coil by a magnetic field produced by an external coil. The resonant frequency is also monitored using magnetic coupling. The capacitance change has been calculated to be about 70.5% corresponding to a 45.8% change in resonant frequency. The reflected impedance magnitude and phase are monitored on the external coil.
Keywords :
bioMEMS; biomedical equipment; MEMS capacitive passively powered heart rate monitor; circuit resonant frequency; device size; external coil; magnetic coupling; polyMUMP; resonant tank circuit; sensor coil; three-structural-layer fabrication process; Capacitance; Coils; Heart rate; Heart rate measurement; Magnetic resonance; Magnetic sensors; Micromechanical devices; Monitoring; RLC circuits; Resonant frequency; MEMS; capacitive sensor; component; heart rate monitor; wireless biomedical devices;
Conference_Titel :
Microsystems and Nanoelectronics Research Conference, 2008. MNRC 2008. 1st
Conference_Location :
Ottawa, Ont.
Print_ISBN :
978-1-4244-2920-2
Electronic_ISBN :
978-1-4244-2921-9
DOI :
10.1109/MNRC.2008.4683383
