Chosen electrical and stability properties of laser-shaped thick-film and LTCC inductors

Author

Bak, Martin ; Dudek, Manuel ; Dziedzic, Andrzej ; Kita, Jaroslaw

Author_Institution

Wroclaw Univ. of Technol., Wroclaw

fYear

2008

fDate

1-4 Sept. 2008

Firstpage

101

Lastpage

104

Abstract

This paper presents fabrication as well as chosen electrical and stability properties of laser-shaped thick-film (made on alumina) and LTCC (with DP 951 ceramic tape as a substrate) inductors. Such components are made based on silver or palladium-silver inks with 14-16 ~m thickness. Inductance, resistance and quality factor, Q_L are determined in a wide frequency (10 kHz - 110 MHz) and temperature (20degC - 250degC) range and are analyzed as a function of inductor geometry (shape and width of conductive tracks) and metallurgy of conductive layer. The stability properties, i.e. fractional inductance and resistance changes after long-term thermal ageing at elevated temperature (150degC and/or 250degC, 250 hours each) are also investigated and analyzed.

Keywords

Q-factor; ageing; alumina; ceramic packaging; electric resistance; inductance; palladium alloys; silver alloys; thick film inductors; Al₂O₃; LTCC inductor; frequency 10 kHz to 110 MHz; inductance; laser shaping; quality factor; resistance; size 14 nm to 16 nm; temperature 20 degC to 250 degC; thermal ageing; thick-film inductor; time 250 hour; Ceramics; Electric resistance; Inductance; Ink; Laser stability; Optical device fabrication; Q factor; Silver; Thermal resistance; Thick film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd

Conference_Location

Greenwich

Print_ISBN

978-1-4244-2813-7

Electronic_ISBN

978-1-4244-2814-4

Type

conf

DOI

10.1109/ESTC.2008.4684332

Filename

4684332