• DocumentCode
    3515303
  • Title

    Numerical modeling of electrodeposition phenomena

  • Author

    Strusevich, Nadia ; Hughes, Michael ; Bailey, Christopher ; Djambazov, Georgi

  • Author_Institution
    Univ. of Greenwich, London
  • fYear
    2008
  • fDate
    1-4 Sept. 2008
  • Firstpage
    281
  • Lastpage
    286
  • Abstract
    Electrodeposition is a widely used technique for the fabrication of high aspect ratio microstructure components. In recent years much research has been focused within this area with an aim to understanding the physics behind the filling of high-aspect ratio vias and trenches on PCBpsilas and in particular how they can be made without the formation of voids in the deposited material. This paper describes some of the fundamental work towards the advancement of numerical models that can predict the electrodeposition process and addresses: i) A novel technique for interface motion based on a variation of a donor-acceptor technique ii) A methodology for the investigation of stress profiles in deposits iii) The implementation of acoustic forces to generate replenishing electrolytic flow circulation in recessed features.
  • Keywords
    electrodeposition; numerical analysis; acoustic forces; donor-acceptor technique; electrodeposition phenomena; electrolytic flow circulation; numerical modeling; stress profiles; Computational fluid dynamics; Computational modeling; Copper; Current distribution; Fabrication; Filling; Microstructure; Numerical models; Physics; Residual stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
  • Conference_Location
    Greenwich
  • Print_ISBN
    978-1-4244-2813-7
  • Electronic_ISBN
    978-1-4244-2814-4
  • Type

    conf

  • DOI
    10.1109/ESTC.2008.4684362
  • Filename
    4684362