DocumentCode

3515435

Title

Effect of polarization on laser etching in microelectronics material processing

Author

Yong-Feng Lu

fYear

1995

fDate

10-14 July 1995

Firstpage

131

Keywords

Etching; Frequency; Gas lasers; Lamps; Laser tuning; Materials processing; Microelectronics; Optical pulses; Polarization; Pulse amplifiers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-2400-5

Type

conf

DOI

10.1109/CLEOPR.1995.527026

Filename

527026