Title :
Mixed thick-/thin film thermoelectric microgenerators
Author :
Markowski, Piotr ; Dziedzic, Andrzej ; Prociów, Eugeniusz
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw
Abstract :
In this work we tried to connect advantages of semiconductor based thermocouples and metal based ones to achieve thermopiles with high output voltage and output power sufficient to supply some low-power microelectronic circuits and microsystems. Series of mixed thick-/thin film thermopiles were performed - one of thermocouples arms was made of magnetron sputtered semiconductor (compositions based on Ge), second was screen-printed (PdAg- or Ag-based thick-film layers). The best parameters were achieved for Ge:Sb:W/Ag structure. Generated output voltage per single thermocouple were 20 mV and output electrical power - 0.55 muW, when temperature difference between hot and cold end were 100 K.
Keywords :
antimony; germanium; low-power electronics; micromechanical devices; silver; thermocouples; thermoelectric conversion; thermopiles; thick film devices; thin film devices; tungsten; Ge:Sb,W-Ag; low-power microelectronic circuits; magnetron sputtered semiconductor; microsystem; mixed thick-thin film thermoelectric microgenerator; power 0.55 muW; screen-printing; semiconductor based thermocouples; temperature 100 K; thermopiles; voltage 20 mV; Arm; Microelectronics; Power generation; Power supplies; Semiconductor thin films; Sputtering; Thermoelectricity; Thin film circuits; Transistors; Voltage;
Conference_Titel :
Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
Conference_Location :
Greenwich
Print_ISBN :
978-1-4244-2813-7
Electronic_ISBN :
978-1-4244-2814-4
DOI :
10.1109/ESTC.2008.4684419
